ST sets up lab-in-a-fab for piezo MEMS

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STMicroelectronics is setting up a 200mm piezoelectric MEMS research facility inside its existing semiconductor fab in Singapore, in conjunction with the Singapore research institute A*STAR’s IME and Japanese manufacturing-tool vendor ULVAC. The three companies have a history of working together. “This collaboration will accelerate the adoption of piezo MEMS actuators in new fields of application …

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