Smallest Si Finfet that functions as a biosensor

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Imec has presented the smallest silicon finFET that functions as a biosensor. Achieving ultrasmall dimensions (13nm fin width and 50nm gate length), and fabricated with a CMOS-compatible process flow in imec’s 300mm cleanroom, imec envisions volume manufacturing and integration into high-throughput, cost-effective detection tools, with 10,000s of these ‘BioFETs’ working in parallel. With a demonstrated …

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